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Event Scheduled for Nov 3, 2017

Event: MSE PhD Dissertation Proposal - Manuel Rivas

Location: IMS-147A

Time: 11:00 am

Details of Event:
PhD Dissertation Proposal

Presenter: Manuel Rivas

Major Advisor: Dr. Bryan D. Huey

Associate Advisors: Dr. Seok-Woo Lee, Dr. Ryan Q. Rudy (ARL), Dr. S. Pamir Alpay, Dr. Ronald G. Polcawich (ARL/DARPA)

Date: Friday, November 3, 2017

Time: 11:00 am

Room: IMS 147A

Title: Iridium Oxide (IrO2) as a Top Electrode for Ferroelectric Micro-Electro-Mechanical Systems (MEMS) Devices


The multifunctional properties of ferroelectric materials make them ideal components for numerous applications including for extreme environments such as space. Iridium oxide (IrO2) electrodes have been demonstrated to improve the lifetime of ferroelectric memory devices, however little is known about its influence on the electromechanical properties important for ferroelectric microelectromechanical systems (MEMS). The performance of thin film lead zirconate titanate (PZT) based MEMS is affected by the processing conditions, composition, device design, electrode materials, and the environment. This work details the development and characterization of iridium oxide electrodes for PZT based microelectromechanical and pyroelectric-harvesting systems, fabrication induced defects, and design of clamped vs unclamped devices. This work also considers the influence of iridium oxide electrodes on the properties of PZT films and MEMS devices subjected to gamma and heavy ion radiation for applications in space and for evaluating nuclear material where human exposure must be kept to a minimum.

Target Audience: Not Available

Sponsored By: Materials Science and Engineering Department

Pamphlet/Flyer: No Pamphlet/Flyer Available

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